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corrosion is not measured directly
from virgin substrates to fully patterned substrates
Thermally grown gate oxide film with gate oxide thicknesses of 20 to 25 nm and polysilicon electrode is used to make a MOS capacitor
SEMI PV87 — Test Method for Peeling Force Between Electrode and Ribbon/Back Sheet
This Guide provides the user with information about containers needed to ship thin wafers that are mounted on dicing tape to tape frames conforming to either SEMI G74 or SEMI G87
E08700 - SEMI E87 - キャリア管理（CMS）のための仕様 StdPbc-0219 corrosion is not measured directlyglobal Information & Control Technical Committee20111224global Audits and Reviews Subcommittee20123www. semiviews. org www. semi. org199920097 SEMI E15. 1300 mm AMHS ID Subordinate Document: SEMI E87. 1 0707 Provisional Specification for SECS II Protocol for Carrier Management (CMS) Referenced SEMI Standards SEMI E15 Specification for Tool Load Port SEMI E15. 1 Specification for 300 mm Tool Load Port SEMI E30 Generic Model for Communications and
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