P01300 - SEMI P13 - Determination of Sodium and Potassium in Positive Photoresists by Atomic Absorption Spectroscopy Revision:SEMI P13-91 (Reapproved 1104) - Inactive may be used for process

may be used for process control

This Guide applies to characterization of consumption

本文書で規定されている要求条件を満たすポリマー材料および配管システムの部品は，¶　1

SEMI M1-1296 (technical revision)

and electrofluidic devices

P01300 - SEMI P13 - Determination of Sodium and Potassium in Positive Photoresists by Atomic Absorption Spectroscopy Revision:SEMI P13-91 (Reapproved 1104) - Inactive may be used for processThis standard was technically approved by the Global Micropatterning Committee and is the direct responsibility of the North American Micropatterning Committee. Current edition approved by the North American Regional Standards Committee on July 11, 2004. Initially available at www. semi. org September 2004; to be published November 2004. Originally published in 1991. NOTICE: This Standard or Safety Guideline has an Inactive Status because the